INTENSITY AMPLIFICATION DEVICE IN TRANSMISSION TYPE SMALL-ANGLE X-RAY SCATTERING (TSAXS) MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To provide a device for amplifying the scattering intensity from a target object in X-ray scattering measurement, to improve the speed and signal quality by amplification of X-ray scattering, and to facilitate the measurement of the critical dimension of the pitch and the analysis of the shape and variation when HVM is performed.;SOLUTION: The present disclosure provides a device for amplifying the scattering intensity in tSAXS measurement. The device includes an enhancement lattice object and an arrangement mechanism. The enhancement lattice object is positioned in a longitudinal coherence length of incident X-rays from a target object. The arrangement mechanism can arrange the enhancement lattice object with respect to the target object at a nanometer accuracy in both of the lateral direction and longitudinal direction.;COPYRIGHT: (C)2015,JPO&INPIT