METHOD OF CALCULATING POWER INPUT TO ARRAY OF THERMAL CONTROL ELEMENTS TO ACHIEVE TWO-DIMENSIONAL TEMPERATURE OUTPUT PROFILE

摘要

PROBLEM TO BE SOLVED: To provide a method for calculating power input to at least one thermal control element of an electrostatic chuck.SOLUTION: The method includes: setting at least one thermal control element (temperature control elements 114a to 114d) to a first predetermined power level; measuring a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting the at least one thermal control element to a second predetermined power level; measuring a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature; calculating a system response of the at least one thermal control element on the basis of the difference; inverting the system response; and calibrating the at least one thermal control element on the basis of the inverted system response.