STATIC ELECTRICITY DISCHARGE TEST DEVICE, STATIC ELECTRICITY DISCHARGE TEST METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To accurately grasp an influence of static electricity by which a measurement object sample is affected.;SOLUTION: A discharge gun 14 discharges electricity to a measurement object sample 100 in accordance with control. A first probe 11 is arranged in the vicinity of a discharge position of the discharge gun 14. A second probe 12 is constituted so as to be movable in the same direction as an installation direction of the measurement object sample 100. The first probe 11 and the second probe 12 are connected to an oscilloscope 16. A control machine 17 determines whether the oscilloscope 16 has outputted a voltage equal to or higher than a prescribed voltage from the first probe 11 or not. If the oscilloscope has outputted a voltage equal to or higher than the prescribed voltage, the control machine 17 evaluates an influence of discharge of the measurement object sample 100 by using a measurement value of an output voltage of the second probe 12 and a peak detection timing of an output voltage of the first probe 11.;COPYRIGHT: (C)2015,JPO&INPIT