CHEMICAL RESISTANCE IMPROVEMENT METHOD OF POLYMER FILM, DEPOSITION METHOD OF POLYMER FILM, DEPOSITION APPARATUS OF POLYMER FILM AND WORKPIECE CONVEYANCE MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a chemical resistance improvement method of a polymer film capable of improving chemical resistance of the polymer film, and dispensing with a new separated processing unit for improving the chemical resistance of the polymer film.;SOLUTION: In a chemical resistance improvement method of a polymer film for improving chemical resistance of the polymer film which is deposited on a surface to be treated of a workpiece, and which is treated by a chemical, a heat treatment for improving chemical resistance of the polymer film is performed in a workpiece conveyance mechanism 130 for conveying the workpiece 1.;COPYRIGHT: (C)2016,JPO&INPIT