PROBLEM TO BE SOLVED: To provide a multilayer substrate and such on which a film to be heated is formed allows the film to be heated to be uniformly heated even when a thickness of the substrate is varied.;SOLUTION: The multilayer substrate includes: a substrate; an optical film formed at one side of the substrate; and an electromagnetic wave absorbing layer that is formed at the other side that is an opposite side of one side of the substrate and absorbs an electromagnetic wave of a wavelength λ irradiated through the optical film and the substrate. Refractive index of the optical film for the λ is larger than that of air and smaller than that of the substrate for the λ.;COPYRIGHT: (C)2015,JPO&INPIT
展开▼
