EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, AND RECORDING MEDIUM WITH PROGRAM OF THE METHOD RECORDED THEREON

摘要

PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source device, capable of extending life of an optical element inside a device and outputting stable EUV light, during a burst operation.;SOLUTION: In an extreme ultraviolet light source device, a target 13 is irradiated with a main pulse L1 to emit EUV light L generated by burst oscillation. The extreme ultraviolet light source device includes a burst control unit C1 configured to control such that, during a burst operation in which the burst oscillation is performed, the main pulse L1 is output while a driver laser 1 outputting the main pulse L1 is in a continuous emission operation, and, when continuous emission during the burst operation is paused, the target material 13 is prevented from being irradiated with the main pulse L1 at a plasma emission site P10 of the EUV light L to pause the emission of the EUV light L.;COPYRIGHT: (C)2015,JPO&INPIT