TEST PIECE FOR CALCULATING ELECTRON SCATTERING DISTANCE AND METHOD FOR CALCULATING ELECTRON SCATTERING DISTANCE

摘要

PROBLEM TO BE SOLVED: To provide a test piece for calculating an electron scattering distance, used for calculating the distribution state of backscattered electron beams that cause a fogging effect in an electron beam exposure system and is incident to a surface of a drawing subject within a chamber of the electron beam exposure system.;SOLUTION: A test piece 1 for calculating an electron scattering distance is used for calculating the distribution state of backscattered electron beams that is incident to a surface of a drawing subject within a chamber of an electron beam exposure system. The test piece 1 for calculating an electron scattering distance is obtained by forming a light shielding layer 6 and a resist layer 7 on a transparent substrate 5 and further coating an electron beam sensitive material 8.;COPYRIGHT: (C)2015,JPO&INPIT