MAGNETIC FIELD ANGLE SENSOR AND MAGNETIC TUNNEL JUNCTION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a magnetic field angle sensor which is capable of accurately measuring a magnetic field angle over a 360° measurement range and cal also be made into one chip.;SOLUTION: The magnetic field angle sensor comprises three types of magnetic tunnel junction (MTJ) element arrays (A-B). A plurality of magnetic tunnel junction elements are patterned in such a manner that the elements have a large aspect ratio and a pinned synthetic multiple layer has a large shape anisotropy after applying first heat treatment in a ferromagnetic field in a reference axis (X) direction. Next, second heat treatment is applied in an atmosphere with no external magnetic field, an exchange pinning magnetic field is decreased, an anisotropy is generated in the pinned synthetic multiple layer by an induced stress, and a magnetization direction of the pinned synthetic multiple layer is aligned with a long axis direction of the magnetic tunnel junction elements.;COPYRIGHT: (C)2015,JPO&INPIT