TEMPERATURE DETECTING ELEMENT CALIBRATION DEVICE, TEMPERATURE DETECTING ELEMENT CALIBRATION SYSTEM, AND TEMPERATURE DETECTING ELEMENT CALIBRATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a temperature detecting element calibration device, a temperature detecting element calibration system, and a temperature detecting element calibration method capable of reducing a size of a furnace casing, achieving a uniform temperature distribution in a space section in a furnace, and calibrating a temperature detecting element.;SOLUTION: Adopted is a temperature detecting element 1 including: a furnace casing 10 that includes a space section 11 storing temperature detection units 2a and 3a of a standard temperature detecting element 2 and a calibration-target temperature detecting element 3, respectively, and a lead-out portion 12 leading out wires 2b and 3b of the standard temperature detecting element 2 and the calibration-target temperature detecting element 3, respectively; a first heater 20 heating the furnace casing 10; and a second heater 30 heating the wires 2b and 3b outside of the furnace casing 10.;COPYRIGHT: (C)2015,JPO&INPIT