surface charge distribution measuring method and surface charge distribution measuring device

摘要

PROBLEM TO BE SOLVED: To enable measuring charge distribution generated on the surface of a sample at high resolution of a micron order.;SOLUTION: A method for measuring surface charge distribution that scans a sample having a surface charge distribution with a charged particle beam and measures the surface charge distribution of the sample, comprises: a model building step for building a surface charge distribution model of the sample on the basis of the configuration of an apparatus; an orbital calculation step for calculating an orbit of the charged particle beam after setting a time interval between a starting point and a next point in time in the model; a measurement step for finding an actual measurement value of the surface charge distribution of the sample; a collation step for collating the electron orbital calculation data calculated in the orbital calculation step with the actual measurement value measured in the measurement step; and a determination step for adopting the surface charge distribution model as an actual surface charge distribution if an error between the electron orbital calculation data and the actual measurement value falls within a predetermined range in the collation step.;COPYRIGHT: (C)2013,JPO&INPIT