Strain sensors, pressure sensors, blood pressure sensors and structures health monitoring sensor

摘要

PROBLEM TO BE SOLVED: To provide a high-sensitive strain sensor, a high-sensitive pressure sensor, a high-sensitive blood pressure sensor, and a high-sensitive structural health monitor sensor.;SOLUTION: A strain sensor includes: a substrate; a stack fixed on the substrate and having a first magnetic layer containing one kind or more metals selected from the group composed of iron, cobalt, and nickel, a second magnetic layer stacked on the first magnetic layer and having a different composition from that of the first magnetic layer, and a spacer layer disposed between the first magnetic layer and the second magnetic layer; and a pair of electrodes passing a current to the stack. By external strain applied to the stack, the first magnetic layer and the second magnetic layer are both rotated by magnetization, and the external strain is detected by a resistance change between the electrodes associated with the magnetization rotation of the first magnetic layer and the second magnetic layer.;COPYRIGHT: (C)2014,JPO&INPIT