Sealing method of a plasma crucible

摘要

Plasma crucible (92) has and the through hole (93) and the end face of the crucible (901, 902) is adhered two tubes (981, 982). One of the tube (981) is closed before filling the crucible. Tube is tipped off, they are processed in a glass lathe in order to be formed to have planar end portion (983). Exhaust, administration, after filling of the gas, the end portion (983) is, while condensing the active ingredient into the hole (93) is heated in order to remove impurities in the administration thereof. Then, the other tube (902) is chipped off in a similar manner. .BACKGROUND 10