LIGHT-SOURCE DEVICE, LIGHT-IRRADIATION DEVICE EQUIPPED WITH LIGHT-SOURCE DEVICE, AND METHOD FOR PATTERNING OF SELF-STRUCTURING MONOMOLECULAR FILM BY USE OF LIGHT-IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide: a light-source device having a lamp which radiates vacuum-ultraviolet light and which can be regarded as a point light source achieving a sufficiently large intensity from a practical viewpoint; and a light-irradiation device equipped with such a light-source device.;SOLUTION: A light-source device comprises a flash lamp 1, a parabolic mirror 2, and power-supply means. The flash lamp 1 and the parabolic mirror 2 are disposed in a lamp housing 3. Light radiated by the flash lamp 1 is made parallel light by the parabolic mirror 2 and then, radiated to outside the lamp housing 3 through a quartz window part 4. The flash lamp 1 has a pair of electrodes, an arc tube, and gas including a xenon gas and sealed in the arc tube. The inter-electrode distance of the pair of electrodes is 12.5 mm or less. The sealed gas is sealed at 2 to 8 atm. The power-supply means supplies the flash lamp 1 with a current. The length of time from the start of discharge to the time when the value of the current reaches a peak value is 8 μs or shorter, and the current value when the current reaches the peak value is 1500 A or larger. The flash lamp 1 radiates light including vacuum-ultraviolet light.;COPYRIGHT: (C)2015,JPO&INPIT