PROBLEM TO BE SOLVED: To accurately measure a parameter of an equivalent circuit.;SOLUTION: Processing 21 for measuring measurement frequency characteristics of impedance Z and a phase θ of a sample, processing 22 for detecting a maximum point and a minimum point in the measurement frequency characteristic of Z, processing 24 for specifying whether an equivalent circuit of the sample is a first equivalent circuit or a second equivalent circuit when only the maximum point is detected, processing 25 for calculating respective parameter values of the first and second equivalent circuits from respective measurement frequency characteristics of Z and θ, processing 26 for calculating a measurement specified frequency characteristic of reactance from respective measurement frequency characteristics of Z and θ, processing 27 for calculating logical first frequency characteristic and logical second frequency characteristic in respective reactance values of the first and second equivalent circuits, processing 28 for specifying an equivalent circuit of a frequency characteristic more approximate to the measurement specified characteristic frequency out of the logical first frequency characteristic and the logical second frequency characteristic as an equivalent circuit of the sample, and processing 29 for determining respective parameter values of the specified equivalent circuit as respective parameter values of the equivalent circuit of the sample are executed.;COPYRIGHT: (C)2013,JPO&INPIT
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