Manufacturing methods and lanthanum hexaboride particles of lanthanum hexaboride fine

摘要

PROBLEM TO BE SOLVED: To provide a method for producing at high productivity, LaB₆ fine particles having high purity and small diameters and suitable as raw material powder for producing an LaB₆ sintered compact used as a sputtering target, and to provide the LaB₆ fine particles having high purity and small diameters and suitable to the above application.;SOLUTION: The method for producing lanthanum hexaboride fine particles includes: a step (a) of mixing a lanthanum compound and a boron compound in such a manner that a B/La atom ratio is controlled to ≤4; a step (b) of firing the mixture obtained in the step (a) in a reducing atmosphere; and a step (c) of subjecting the fired material obtained in the step (b) to acid cleaning. In the lanthanum hexaboride fine particles, the content of a carbon element is ≤0.5 mass%, the content of an oxygen element is ≤1 mass%, and also, the average particle diameter is 50 to 600 nm.;COPYRIGHT: (C)2012,JPO&INPIT