X-RAY TESTING DEVICE FOR MATERIAL TESTING AND METHOD FOR GENERATION OF HIGH-RESOLUTION PROJECTION OF TEST OBJECT BY MEANS OF X-RAY BEAM

摘要

PROBLEM TO BE SOLVED: To provide a technique for controlling electron beams from an X-ray tube and a rotary anode, for achieving a high-resolution X-ray magnified projection device.;SOLUTION: A highly focusing X-ray source 10 includes: a rotary anode assembly 20 having an anode plate 22 rotatably mounted thereon and an anode plate drive 28 configured to control the rotation of the anode plate; an electron gun 40 configured to produce a focused electron beam 42; and an electron beam control unit 50. The electron beam control unit 50 has an electron beam deflecting unit 52 and a control unit 54, and controls the point 44 of incidence of the electron beam 42 on the anode plate 22. The position of a bracket 102 for a test object 100 is fixed or can be fixed to the rotary anode assembly 20.;COPYRIGHT: (C)2015,JPO&INPIT