occurs dislocation prediction method from the oxygen precipitates that occur when applying a laser spike annealing by simulation

摘要

PROBLEM TO BE SOLVED: To provide a method for predicting occurrence transposition from a BMD generated when simulation based LSA is applied, which makes it possible to exactly predict a physical phenomenon occurring inside a silicon substrate in an LSA process.;SOLUTION: In first to fifth steps, a substrate is turned into a mesh by fractionating it into mesh elements, and a temporal change of temperature distribution on the substrate relative to the incident energy of an LSA laser beam as a load is obtained, and further a temporal change of thermal stress distribution is obtained from the temperature distribution. In sixth to eighth steps, distributions in the depth direction at an arbitrary position A are selected at each time, and a critical stress of transposition occurring from a BMD is obtained from the selected temperature distribution and then shear stress is obtained from the selected stress distribution. In ninth to eleventh steps, the critical and shear stresses are compared every depth position, and transposition lengths at each depth position are obtained from the comparison result, and the depth of slip occurrence is obtained from the transposition length.;COPYRIGHT: (C)2013,JPO&INPIT