Groove machining tool, groove machining method and groove machining apparatus for thin-film solar cell using the same

摘要

PROBLEM TO BE SOLVED: To provide a groove processing tool capable of manufacturing an integrated thin-film solar cell in high yield.SOLUTION: Groove processing is performed to a thin film of a thin-film solar cell by using a groove processing tool that is composed of a rod-like body 81 and a truncated-cone shaped cutting edge region 82 formed at a tip of the body 81, wherein the cutting edge region 82 includes a bottom face 83 and a side face 84 extending from the bottom face 83 toward the body 81, a corner formed by the bottom face 83 and the side face 84 makes a cutting edge 85, and the processing tool is formed so as to be getting thinner from the bottom face 83 toward the body 84.