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Silicon-containing diamond-like carbon thin film, method for producing the same, and use thereof

机译:含硅的类金刚石碳薄膜,其制备方法及其用途

摘要

As for this invention, as for the silicon content diamond condition carbon thin film, inside and on the surface of the diamond condition carbon thin film which contains silicon on the surface, carbon and the silicon atom and grants hydrophilic to the surface of that thin film the atom which exist on the surface of that thin film (A) it features that it possesses the chemical bond between the silicon content diamond condition carbon thin film, in regard to the production manner, and its application.
机译:对于本发明,硅含量的金刚石条件碳薄膜在金刚石条件碳薄膜的内部和表面上,该金刚石条件碳薄膜的表面上含有硅,碳和硅原子并赋予该薄膜表面亲水性。存在于该薄膜(A)的表面上的原子,就其制造方式和用途而言,具有在硅含量的金刚石条件碳薄膜之间具有化学键的特征。

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