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Silicon-containing diamond-like carbon thin film, method for producing the same, and use thereof
Silicon-containing diamond-like carbon thin film, method for producing the same, and use thereof
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机译:含硅的类金刚石碳薄膜,其制备方法及其用途
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摘要
As for this invention, as for the silicon content diamond condition carbon thin film, inside and on the surface of the diamond condition carbon thin film which contains silicon on the surface, carbon and the silicon atom and grants hydrophilic to the surface of that thin film the atom which exist on the surface of that thin film (A) it features that it possesses the chemical bond between the silicon content diamond condition carbon thin film, in regard to the production manner, and its application.
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