首页>
外国专利>
Microelectromechanical magnetic field sensor utilizing improved inertial elements
Microelectromechanical magnetic field sensor utilizing improved inertial elements
展开▼
机译:利用改进的惯性元件的微机电磁场传感器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.
展开▼