MICRO ELECTRICAL MECHANICAL MAGNETIC FIELD SENSOR UTILIZING MODIFIED INERTIAL ELEMENTS

摘要

A microelectromechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm having a first longitudinal axis extending over the substrate and pivotally mounted on the first pivot to pivot about a first pivot axis, A first capacitor layer formed on the substrate at a location below the first capacitor portion of the first lever arm; a second capacitor layer formed on the substrate at a location below the second capacitor portion of the first lever arm, A first pivot supporting the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis and a second capacitor layer spaced apart from the first pivot axis, And a first conductor member extending across the first longitudinal axis.