Real-time monitoring for imaging and simultaneous irradiation in the charged particle beam system .

摘要

PROBLEM TO BE SOLVED: To provide a method of observing or processing a sample with charged particles which prevents damage or alteration of a sample due to an irradiation beam and enables visualization and processing of a microstructure.;SOLUTION: While a scanning beam 232 processes a workpiece 239, a detector 240 directly collects data including signals generated during a dwell period of the scanning beam 232 on the workpiece 239, and a real-time monitor unit 214 associates a point on the workpiece 239 with a received specific time, to calibrate a delay time for use in moving to a next point.;COPYRIGHT: (C)2013,JPO&INPIT