Recycling method of stripping solution recycling system and the operating method and the stripping solution

摘要

PROBLEM TO BE SOLVED: To provide a recycling system of a stripping liquid using a photoresist stripping liquid, which is used for stripping a photoresist while avoiding damages on a Cu film in the process of wet-etching a Cu film or a Cu alloy film on a substrate having a large area to form wiring lines or the like, and which does not decrease in the adhesion strength between the Cu film and a layer to be deposited on the Cu film.;SOLUTION: The system includes: a resist stripping device, which repeatedly uses a stripping liquid comprising a resist component and a mixture liquid of a main agent, a polar solvent and water, discharges a part of the stripping liquid through a discharge pipe when the resist concentration in the stripping liquid reaches a predetermined value, and is supplied with a new stripping liquid; a waste liquid tank; a distillation regeneration apparatus for distilling the stripping liquid in the waste liquid tank; a component inspection device for inspecting composition ratios of the main agent and the polar solvent in a liquid separated by the distillation; a preparation device for preparing the mixture liquid by adding the main agent, the polar solvent and water for the shortfall so as to obtain preliminarily determined ratios of the main agent, the polar solvent and water in the separated liquid; and a supply tank reserving the mixture liquid.;COPYRIGHT: (C)2013,JPO&INPIT