Phase adjustment method of the optical waveguide and the optical waveguide interferometer circuit and optical waveguide interferometer circuit

摘要

PROBLEM TO BE SOLVED: To adjust a phase of an optical waveguide interferometer circuit with high accuracy and everlasting durability.;SOLUTION: Specific sections not filled with backfilling resin 51 out of grooves 41, 42, 43, 44 formed along the upper-side and lower-side arm waveguides 31, 32 are used as phase adjustment grooves 41a, 42a, 43a, 44a. In order to perform phase adjustment, for example, the phase adjustment grooves 43a, 44a along the lower-side arm 32 are filled with resin 52 for the phase adjustment, thereby capable of performing the phase adjustment of an optical waveguide interferometer circuit 10.;COPYRIGHT: (C)2013,JPO&INPIT