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The gyro meter in surface technology using out-of-plane detection by the strain gauge
The gyro meter in surface technology using out-of-plane detection by the strain gauge
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机译:表面技术中的陀螺仪,使用应变计进行面外检测
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摘要
The device has a thick zone comprising free mechanical masses (3, 3') adapted to be vibrated in its plane (S) perpendicular to a rotational axis (Z), and a vibrating unit vibrating each mass in the plane. A thin zone forms a suspended type strain gauge (4) e.g. resonator, for detecting a rotational movement of the mass around another rotational axis. The thin zone extends in a plane parallel to a plane of a substrate (50), and extends in a plane perpendicular to the latter rotational axis. The thin zone is connected to one of the thick zone and another thick zone and to the substrate.
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