Doped zinc oxide thin film manufacturing for composition and method of manufacturing the doped zinc oxide thin films using it .

摘要

PROBLEM TO BE SOLVED: To provide a composition for producing a zinc oxide thin film, which uses an organic zinc compound as a starting material, is not ignitable, and can be easily handled, and which can form a transparent zinc oxide thin film doped with a group 3B element by being heated at ≤300°C, and to provide a method for obtaining a transparent zinc oxide thin film doped with a group 3B element using the composition.;SOLUTION: The composition for producing a doped zinc oxide thin film contains a product which is obtained by partially hydrolyzing an organic zinc compound by adding water to a solution of the organic zinc compound and a group 3B element compound, wherein the molar ratio of the group 3B element compound to the organic zinc compound is within the range of 0.005-0.3. The composition for producing a doped zinc oxide thin film contains a product which is obtained by partially hydrolyzing an organic zinc compound by adding water to a solution of the organic zinc compound and then adding a group 3B element compound so that the molar ratio of the group 3B element compound to the organic zinc compound is within the range of 0.005-0.3. The method for forming a zinc oxide thin film doped with a group 3B element includes applying the composition on the surface of a substrate and heating the applied composition.;COPYRIGHT: (C)2011,JPO&INPIT