vacuum deterioration detection method with a degree of vacuum deterioration detector vacuum switch and a vacuum switch

摘要

Under a load sensor coupled to a cylindrical vacuum container of the vacuum valve (2) (2a) (41), facing against the vacuum chamber (2a), a movable contact and a fixed contact (2b) (2c) Load an insulating member which acts in the direction (21), is measured through a connecting fitting (22), the signal processing unit (42) is the degree of vacuum in the vacuum valve (2) by calculating the time variation of the load deterioration of the is to provide a degree of vacuum degradation detection method of determining the degree of vacuum deterioration detector equipped vacuum switch and a vacuum switch.