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Thin film sheet and laminated sheet provided with a vapor deposition material and thin film for thin film formation .
Thin film sheet and laminated sheet provided with a vapor deposition material and thin film for thin film formation .
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机译:薄膜片和层压片设有气相沉积材料和薄膜形成用薄膜。
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摘要
PROBLEM TO BE SOLVED: To provide a vapor deposition material suitable for forming a thin film excellent in transparency and gas-barrier property, and to provide a thin film sheet having the thin film, and a laminated sheet.SOLUTION: The vapor deposition material is prepared by mixing a first oxide powder and a second oxide powder, wherein the material is characterized in that: the first oxide powder is CeOpowder; the first oxide powder has 98% or higher purity of the first oxide; the second oxide powder is a powder of one of MgO and CaO or a mixture powder of two more compounds selected from a group consisting of ZnO, MgO and CaO; the second oxide powder has 98% or higher purity of the second oxide; the vapor deposition material comprises pellets containing particles of the first oxide and particles of the second oxide; the ratio of the first oxide to the second oxide in the vapor deposition material is (5 to 85):(95 to 15); and the pellets have a basicity of 0.1 or more.
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