首页> 外国专利> Thin film sheet and laminated sheet provided with a vapor deposition material and thin film for thin film formation .

Thin film sheet and laminated sheet provided with a vapor deposition material and thin film for thin film formation .

机译:薄膜片和层压片设有气相沉积材料和薄膜形成用薄膜。

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition material suitable for forming a thin film excellent in transparency and gas-barrier property, and to provide a thin film sheet having the thin film, and a laminated sheet.SOLUTION: The vapor deposition material is prepared by mixing a first oxide powder and a second oxide powder, wherein the material is characterized in that: the first oxide powder is CeOpowder; the first oxide powder has 98% or higher purity of the first oxide; the second oxide powder is a powder of one of MgO and CaO or a mixture powder of two more compounds selected from a group consisting of ZnO, MgO and CaO; the second oxide powder has 98% or higher purity of the second oxide; the vapor deposition material comprises pellets containing particles of the first oxide and particles of the second oxide; the ratio of the first oxide to the second oxide in the vapor deposition material is (5 to 85):(95 to 15); and the pellets have a basicity of 0.1 or more.
机译:解决的问题:提供一种适用于形成透明性和阻气性优异的薄膜的气相沉积材料,并提供具有该薄膜的薄膜片和层压片。通过混合第一氧化物粉末和第二氧化物粉末制备,其特征在于:所述第一氧化物粉末为CeOpowder;第一氧化物粉末具有第一氧化物的98%或更高的纯度;第二氧化物粉末是MgO和CaO之一的粉末或选自ZnO,MgO和CaO的两种以上化合物的混合物粉末。第二氧化物粉末的第二氧化物的纯度为98%以上。气相沉积材料包括含有第一氧化物颗粒和第二氧化物颗粒的粒料。蒸镀材料中的第一氧化物与第二氧化物之比为(5〜85):(95〜15)。颗粒的碱度为0.1以上。

著录项

  • 公开/公告号JP5664162B2

    专利类型

  • 公开/公告日2015-02-04

    原文格式PDF

  • 申请/专利权人 三菱マテリアル株式会社;

    申请/专利号JP20100256422

  • 发明设计人 有泉 久美子;黛 良享;黒光 祥郎;

    申请日2010-11-17

  • 分类号C23C14/24;C04B35/04;C04B35/057;C04B35/453;C04B35/50;B32B9/00;

  • 国家 JP

  • 入库时间 2022-08-21 15:27:49

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