The manufacturing method of the surface silica material which is a carbon coating and said carbon is manufactured by a manufacturing method coated silica materials and use thereof

摘要

PROBLEM TO BE SOLVED: To provide a simple and efficient method for producing carbon-coated silica material having uniform carbon-coating on a surface of a silica material and that of adjustable thickness.;SOLUTION: In the method for producing carbon-coated silica material, the silica material with carbon-coated surface by an organic silylating agent is heated at the temperature that organic group of the organic silylating agent is removed, and then the silica material is processed with CVD.;COPYRIGHT: (C)2013,JPO&INPIT