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SCHEDULE MAKING DEVICE, SUBSTRATE PROCESSING APPARATUS, SCHEDULE MAKING PROGRAM, SCHEDULE MAKING METHOD, AND SUBSTRATE PROCESSING METHOD
SCHEDULE MAKING DEVICE, SUBSTRATE PROCESSING APPARATUS, SCHEDULE MAKING PROGRAM, SCHEDULE MAKING METHOD, AND SUBSTRATE PROCESSING METHOD
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机译:时间表制作设备,基板处理设备,时间表制作程序,时间表制作方法和基板处理方法
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摘要
To provide a technique capable of making a schedule with good time efficiency in schedule making for the transport of substrates. A schedule making device makes a judgment as to whether a batch carrying-out procedure can complete the transport earlier than a sequential carrying-out procedure or not, and selectively employs these procedures in accordance with a result of the judgment. The sequential carrying-out procedure is a procedure in which substrates are transported to a predetermined transport destination in chronological order of the times at which the transport process can start, and the batch carrying-out procedure is a procedure in which a substrate the transport process of which can start is not transported until a time at which the transport process of a succeeding substrate can start, and the substrates are transported together to a transport destination at the time when the transport process of the succeeding substrate can start.
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