ADJUSTABLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOYING SUCH A SYSTEM

摘要

A cathodoluminescence detection system is provided, includinga source of charged particles arranged to illuminate a sample with a charged particle beam, andan optical path having at least two optical components capable of collecting and conveying light radiation coming from the illuminated sample to an analysis device;each optical component of the optical path is selected so that:the maximum output angle of the optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; andthe diameter of the radiation coming from the optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.