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APPARATUS AND METHOD FOR BULK VAPOUR PHASE CRYSTAL GROWTH
APPARATUS AND METHOD FOR BULK VAPOUR PHASE CRYSTAL GROWTH
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机译:大体积气相结晶生长的装置和方法
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摘要
A vapour conduit for use in an apparatus for bulk vapour phase crystal growth, an apparatus for bulk vapour phase crystal growth, and a process for bulk vapour phase crystal growth are described. The vapour conduit is a flow conduit defining a passage means adapted for transport of vapour from a source volume to a growth volume, wherein a flow restrictor is provided in the passage means between the source volume and the growth volume and wherein the flow conduit further comprises a flow director structured to direct vapour flow downstream of the flow restrictor away from a longitudinal centre line of the conduit and for example towards an edge of the conduit.
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