MICRO-ELECTRO-MECHANICAL SYSTEM MIRROR AND MICRO-ELECTRO-MECHANICAL SYSTEM REFLECTIVE DEVICE

摘要

A micro-electro-mechanical system mirror comprises a reflective mirror and a number of MEMS driving modules. A number of driving shafts extend from a side surface of the mirror body, each driving shaft being connected to a driving module. Each driving module comprises a container of liquid, an optical fiber, and a light source. The container includes a main body having an opening sealed with a film. The sealing film is arranged toward the driving shaft and seals in the liquid in the container. An optical fiber is inserted into the through holes in the main body of the container and a light source is arranged at the other end of the optical fiber. Light arriving through the optical fiber causes the liquid to expand and deform the sealing film to push against and thus orientate the mirror body.