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CRYSTALLINE ALLOY HAVING GLASS-FORMING ABILITY, PREPARATION METHOD THEREOF, ALLOY TARGET FOR SPUTTERING, AND PREPARATION METHOD THEREOF
CRYSTALLINE ALLOY HAVING GLASS-FORMING ABILITY, PREPARATION METHOD THEREOF, ALLOY TARGET FOR SPUTTERING, AND PREPARATION METHOD THEREOF
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机译:具有玻璃形成能力的结晶合金,其制备方法,用于溅射的合金靶及其制备方法
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摘要
Provided are a crystalline alloy having significantly better thermal stability than an amorphous alloy as well as glass-forming ability, and a method of manufacturing the crystalline alloy. The present invention also provides an alloy sputtering target that is manufactured by using the crystalline alloy, and a method of manufacturing the alloy target. According to an aspect of the present invention, provided is a crystalline alloy having glass-forming ability which is formed of three or more elements having glass-forming ability, wherein the average grain size of the alloy is in a range of 0.1 μm to 5 μm and the alloy includes 5 at % to 20 at % of aluminum (Al), 15 at % to 40 at % of any one or more selected from copper (Cu) and nickel (Ni), and the remainder being zirconium (Zr).
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