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Memory Structures, Memory Arrays, Methods of Forming Memory Structures and Methods of Forming Memory Arrays

机译:存储器结构,存储器阵列,形成存储器结构的方法和形成存储器阵列的方法

摘要

Some embodiments include methods of forming memory structures. An electrically insulative line is formed over a base. Electrode material is deposited over the line and patterned to form a pair of bottom electrodes along the sidewalls of the line. Programmable material is formed over the bottom electrodes, and a top electrode is formed over the programmable material. The bottom electrodes may each contain at least one segment which extends at angle of from greater than 0° to less than or equal to about 90° relative to a planar topography of the base. Some embodiments include memory structures having a bottom electrode extending upwardly from a conductive contact to a programmable material, with the bottom electrode having a thickness of less than or equal to about 10 nanometers. Some embodiments include memory arrays and methods of forming memory arrays.
机译:一些实施例包括形成存储器结构的方法。在基座上方形成电绝缘线。电极材料沉积在生产线上并被图案化,以沿着生产线的侧壁形成一对底部电极。可编程材料形成在底部电极上方,顶部电极形成在可编程材料上方。底部电极可各自包含至少一个相对于基底的平面形貌以大于0°至小于或等于约90°的角度延伸的段。一些实施例包括具有底部电极的存储结构,该底部电极从导电触点向上延伸至可编程材料,并且底部电极的厚度小于或等于大约10纳米。一些实施例包括存储器阵列和形成存储器阵列的方法。

著录项

  • 公开/公告号US2014346431A1

    专利类型

  • 公开/公告日2014-11-27

    原文格式PDF

  • 申请/专利权人 MICRON TECHNOLOGY INC.;

    申请/专利号US201414455298

  • 发明设计人 SCOTT E. SILLS;

    申请日2014-08-08

  • 分类号H01L45/00;H01L27/24;

  • 国家 US

  • 入库时间 2022-08-21 15:23:09

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