VACUUM DRYING APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS BY USING THE SAME

摘要

A vacuum drying apparatus and a method of manufacturing a display apparatus by using the same. A vacuum drying apparatus according to embodiments of the present invention includes a chamber having a space formed therein, a support unit that is installed in the chamber and on which a substrate coated with a treatment solution is stably placed, a gas injection unit that is connected to the chamber to inject a treatment gas into the chamber, a decompression unit that is connected to the chamber to decompress the chamber, and a gas sensing unit that is installed with at least one of the chamber and the decompression unit to detect gas generated during drying of the treatment solution.