System for Managing a Cleanroom Environment

摘要

A system for managing cleanroom resources by providing a number of critical features in an integrated, low-cost package is described. The critical features include monitoring and recording cleanroom environmental conditions such as temperature, humidity and room differential pressure, notifying users of alarm situations when cleanroom environmental conditions fall outside predetermined limits, and reducing cleanroom energy usage by turning off HEPA filter fan units (FFUs) and cleanroom lights when they are not needed.