首页> 外国专利> METHOD FOR ENHANCING CONDUCTIVITY OF MOLYBDENUM THIN FILM BY USING ELECTRON BEAM IRRADIATION

METHOD FOR ENHANCING CONDUCTIVITY OF MOLYBDENUM THIN FILM BY USING ELECTRON BEAM IRRADIATION

机译:电子束辐照增强钼薄膜导电性的方法

摘要

Disclosed is a method for manufacturing a solar cell, which is capable of enhancing the conductivity of a molybdenum thin film by decreasing the specific resistivity and thickness of the molybdenum thin film that is a back electrode. The method for manufacturing the solar cell according to the present invention includes: a step of forming a molybdenum thin film on a substrate; and a step of performing a post-processing process on the molybdenum thin film to form a back electrode. Here, the post-processing process with respect to the molybdenum thin film may be performed by irradiating an electron beam.
机译:公开了一种太阳能电池的制造方法,该方法能够通过减小作为背电极的钼薄膜的比电阻率和厚度来提高钼薄膜的导电性。根据本发明的太阳能电池的制造方法包括:在基板上形成钼薄膜的步骤;以及在基板上形成钼薄膜的步骤。在钼薄膜上进行后处理以形成背电极的步骤。在此,可以通过照射电子束来对钼薄膜进行后处理。

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