METHOD FOR CALCULATING NITROGEN CONCENTRATION IN SILICON SINGLE CRYSTAL AND METHOD FOR CALCULATING RESISTIVITY SHIFT AMOUNT

摘要

A method for calculating a nitrogen concentration in a silicon single crystal doped with nitrogen, wherein the correlation among a carrier concentration difference Δ[n] obtained from a difference between resistivity after heat treatment by which an oxygen donor is eliminated and resistivity after heat treatment by which a nitrogen-oxygen donor is eliminated, an oxygen concentration [Oi], and a nitrogen concentration [N] in the nitrogen-doped silicon single crystal is obtained in advance, and an unknown nitrogen concentration [N] in a nitrogen-doped silicon single crystal is obtained by calculation from the carrier concentration difference Δ[n] and the oxygen concentration [Oi] based on the correlation. As a result, a method for calculating a nitrogen concentration in a silicon single crystal, the method that can obtain the value of a nitrogen concentration even when an oxygen concentration is different, and a method for calculating the shift amount of resistivity are provided.