MEMS/NEMS DEVICE COMPRISING A NETWORK OF ELECTROSTATICALLY ACTUATED RESONATORS AND HAVING AN ADJUSTABLE FREQUENCY RESPONSE, NOTABLY FOR A BAND-PASS FILTER

摘要

A MEMS/NEMS device having an adjustable frequency response comprises an array of electrostatically actuated resonators, an electrostatic actuation circuit, electrical detection means, and means adjusting the frequency response of the resonators. The device comprises resonators having a movable portion, electrically connected in series between a first biasing potential V_B and a second biasing potential V_B2, each resonator biased to a potential Vi between V_B and V_B2, depending on position in the series. The electrostatic actuation circuit comprises, for each resonator, an actuation electrode facing the movable portion, all electrodes being connected in parallel to a common control potential V_IN, the actuation voltage of each resonator being equal to V_IN−Vi. The detection means comprises a detection output common to all resonators, the output being connected to an output potential V_out. The means for adjusting the frequency response varies the common control potential and/or at least one of the biasing potentials.