NON-UNIFORM HEATER FOR REDUCED TEMPERATURE GRADIENT DURING THERMAL COMPRESSION BONDING

摘要

Embodiments of a method for performing a thermal compression bonding process with a non-uniform temperature pattern and a heater having the non-uniform temperature pattern are disclosed. In some embodiments, the heater includes a plurality of heating element segments configured to generate the non-uniform temperature pattern. The configuration comprises a plurality of heating element segment densities or a plurality of heating element segment resistances.