首页>
外国专利>
HIGH DIELECTRIC CONSTANT TRANSITION METAL OXIDE MATERIALS
HIGH DIELECTRIC CONSTANT TRANSITION METAL OXIDE MATERIALS
展开▼
机译:高介电常数过渡金属氧化物材料
展开▼
页面导航
摘要
著录项
相似文献
摘要
A transition metal oxide dielectric material is doped with a non-metal in order to enhance the electrical properties of the metal oxide. In a preferred embodiment, a transition metal oxide is deposited over a bottom electrode and implanted with a dopant. In a preferred embodiment, the metal oxide is hafnium oxide or zirconium oxide and the dopant is nitrogen. The dopant can convert the crystal structure of the hafnium oxide or zirconium oxide to a tetragonal structure and increase the dielectric constant of the metal oxide.
展开▼