Doubly-clamped bean quartz micro-resonator

摘要

A resonator includes a base substrate with anchor pads, and a quartz resonator device including a resonant microbridge with an electrode, a first flexure beam connected to an end of the microbridge, a second flexure beam connected to a second end of the microbridge, a first and second spring connected between the first flexure beam and first and second anchor mounts, respectively, a third and fourth spring connected between the second flexure beam and third and fourth anchor mounts, respectively, the anchor mounts connected to anchor pads on the base substrate. A single crystal quartz includes the microbridge, the flexure beams, the springs, and the anchor mounts. The flexure beams and the springs prevent buildup of stress in the microbridge.