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Photo-patternable dielectric materials curable to porous dielectric materials, formulations, precursors and methods of use thereof
Photo-patternable dielectric materials curable to porous dielectric materials, formulations, precursors and methods of use thereof
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机译:可固化成多孔介电材料的可光图案化介电材料,制剂,前体及其使用方法
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摘要
Silsesquioxane polymers that cure to porous silsesquioxane polymers, silsesquioxane polymers that cure to porous silsesquioxane polymers in negative tone photo-patternable dielectric formulations, methods of forming structures using negative tone photo-patternable dielectric formulations containing silsesquioxane polymers that cure to porous silsesquioxane polymers, structures containing porous silsesquioxane polymers and monomers and method of preparing monomers for silsesquioxane polymers that cure to porous silsesquioxane polymers.
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