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Microelectromechanical device having an oscillating mass and method for controlling a microelectromechanical device having an oscillating mass
Microelectromechanical device having an oscillating mass and method for controlling a microelectromechanical device having an oscillating mass
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机译:具有振荡质量的微机电装置和用于控制具有振荡质量的微机电装置的方法
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摘要
A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass.
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