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Microelectromechanical device having an oscillating mass and method for controlling a microelectromechanical device having an oscillating mass

机译:具有振荡质量的微机电装置和用于控制具有振荡质量的微机电装置的方法

摘要

A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass.
机译:一种微机电装置,包括:主体;可动质量,其可弹性地连接至所述主体并且可根据自由度而移动;以及驱动装置,其与所述可动质量耦接并且被配置为将所述可动质量保持在稳定的工作频率下振荡。在正常操作模式下。此外,微机电装置包括启动装置,该启动装置可在启动运行模式中被激活并且被配置为将与可移动质量的振荡相关的第一信号的当前振荡频率与参考频率进行比较,并且用于确定,根据当前振荡频率和参考频率之间的比较,是否向可移动块提供一个强制信号包,以便将能量传递到可移动块。

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