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PVD—vacuum coating unit

机译:PVD—真空镀膜机组

摘要

A vacuum coating unit includes a reactive gas inlet, at least one PVD coating source with a laminar cathode and a substrate carrier containing a multiplicity of substrates. The substrate carrier forms a two dimensional horizontal extent, and the carrier is between at least two PVD coating sources. The substrates are cutting tools with at least one cutting edge in their peripheral margin region, which are distributed in a plane of the two dimensional extent of the substrate carrier. The substrate carrier is in a horizontal plane in the vacuum process chamber spaced between the laminar cathodes of the PVD coating sources and positioned such that at least a portion of each of the at least one cutting edge includes an active cutting edge and this active cutting edge is oriented opposite at least one of the cathodes of the PVD coating sources exposed at any time along a line of sight.
机译:真空涂覆单元包括反应气体入口,具有层状阴极的至少一个PVD涂覆源以及包含多个基底的基底载体。基材载体形成二维水平范围,并且载体在至少两个PVD涂层源之间。基底是切割工具,其在其外围边缘区域中具有至少一个切削刃,该切削刃分布在基底载体的二维范围的平面中。衬底载体在真空处理室中的水平面中,在PVD涂层源的层状阴极之间间隔开,并且被定位成使得至少一个切削刃中的每一个的至少一部分包括有效切削刃,并且该有效切削刃沿视线随时暴露的PVD涂层源的至少一个阴极的相反方向取向。

著录项

  • 公开/公告号US8968830B2

    专利类型

  • 公开/公告日2015-03-03

    原文格式PDF

  • 申请/专利权人 JUERGEN RAMM;CHRISTIAN WOHLBAB;

    申请/专利号US20080270415

  • 发明设计人 JUERGEN RAMM;CHRISTIAN WOHLBAB;

    申请日2008-11-13

  • 分类号C23C14/22;C23C14/32;C23C14/50;

  • 国家 US

  • 入库时间 2022-08-21 15:17:50

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