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Integrated optical waveguide evanescent field sensor and longitudinal section of a substrate for use in such a sensor

机译:集成的光波导瞬逝场传感器和用于这种传感器的基板的纵向截面

摘要

The invention relates to an integrated optical waveguide evanescent field sensor (1) for sensing of chemical and/or physical quantities, comprising a substrate (2) carrying a waveguide layer structure provided with—a waveguide core layer (10) sandwiched between two cladding layers (11, 12) formed by a lower (11) and a upper (12) cladding layer, of a lower refractive index than the waveguide core layer (10), —a sensing section (14A, 14B) comprising a sensing layer (13) included in the upper cladding layer (12), wherein a longitudinal section of said substrate including said waveguide layer structure and said sensing section (14A, 14B) is exchangeable as a separate element (20).
机译:本发明涉及一种用于感测化学和/或物理量的集成光波导渐逝场传感器( 1 ),其包括带有所提供的波导层结构的衬底( 2 )。 -波导芯层( 10 )夹在由下层( 11 )和上层形成的两个包层( 11、12 )之间( 12 )包覆层,其折射率比波导芯层( 10 )低,—感应部分( 14 A,< B> 14 B)包括包含在上包层( 12 )中的传感层( 13 ),其中所述基板的纵向截面包括所述波导层结构和所述传感部分( 14 A, 14 B)可作为单独的元素( 20 )互换。

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