Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element

摘要

Provided is an NBT-BT lead-free piezoelectric film having a high crystalline orientation and a high piezoelectric constant. The present invention is a piezoelectric film comprising a Na_xM_1-x layer and a (Bi, Na)TiO₃—BaTiO₃ layer. The (Bi, Na) TiO₃—BaTiO₃ layer is formed on the Na_xM_1-x layer, where M represents Pt, Ir, or PtIr and x represents a value of not less than 0.002 and not more than 0.02. Both of the Na_xM_1-x layer and the (Bi, Na) TiO₃—BaTiO₃ layer have a (001) orientation only, a (110) orientation only, or a (111) orientation only.