Method of entraining substrates when depositing thin layer onto substrate surfaces and rotary table for entraining substrates according the method

摘要

The present invention relates to a method of entraining substrates when depositing thin surface layer and a rotary table for making the same wherein the rotary table (1) comprises at least one revolving tray (3) with planetary substrate (2) drivers (5) arranged thereon. Axes of rotation (6) of the planetary drivers (5) along with the rotary table (1) axis of rotation (4) form an angle {alpha} in the range of 15 degrees to 75 degrees. The quantity of the revolving trays (3) on the rotary table (1) cage can be easily and simply changed, such that the rotary table accommodates (1) as many substrates (2) as possible, whereby the quality of the surface layers applied thereto is maintained. A large storing capacity of the rotary table (1) is ensured by spatial arrangement of the substrates (2).