Vacuum feedthrough for chemical reactor and particularly to a CVD and HVPE reactors

摘要

the utility model is a vacuum sluice to chemical reactor and particularly cvd reactors and hvpe grommet tube agitating reaction gases. culvert allows two degrees of freedom the gas delivery tube.tube of quartz (l) driving gas cores embedded in a culvert (2), is fixed together with the sleeve in two embedded steel so don't take my word mimou015brodowych bushes: liner mimou015brodowe (3) and (4) naku0142adce mimou015brodowej rotating sleeves can move relative to each other over uszczelnio to oringami pipes kwarcowej (l) of about 1 mm in any direction.what means to shunt the end of the pipe by approximately 8 mm in each direction. the solution enables the free setting of supplying gases, by which allows optimisation of the process.